TAU IS BUILDING THE
ULTIMATE LIGHT SOURCE FOR
SEMICONDUCTOR LITHOGRAPHY

Advanced semiconductors are the foundation for the most important innovations of the 21st century. But the leading lithography machines, used to print the most advanced chips, are approaching their economic and physical limits.

The price tags of these machines reach several $100M, driven by their incredible complexity. The inefficient light sources that power them limit their capabilities.

Without a fundamental change, their technology is incapable of printing more advanced chips while remaining economically viable.

TAU is developing the light source for the next generation of lithography — X-ray lasers built on compact particle accelerators. 

Our lasers are small enough to fit in existing fabs and bright enough to print the smallest features at the limits of quantum physics.

SMALL ACCELERATORS, BIG IMPACT

We are addressing increasingly impactful applications
as we build our technology for the ultimate lithography light source.

Radiation testing for space exploration

Electronics in space are exposed to radiation without the protection of Earth’s magnetic field and atmosphere. Space commercialization requires electronics tested for the rigors of space. 

TAU has developed a groundbreaking testing approach to meet growing industry needs.
Electron therapy for cancer treatment

Radiotherapy is used to treat half of all cancers. Proton therapy is the most advanced form of treatment, but its costs and scarcity lead to most patients being treated with conventional X-rays.

TAU is developing Very High Energy Electron radiotherapy to provide proton-quality treatment at X-ray costs.
X-ray lithography for artificial intelligence

Lithography is the process of printing semiconductor chips. Extreme ultraviolet lithography is used for advanced chips, but its costs are exploding while improvements in capability see only diminishing returns.

TAU is developing compact particle accelerators that drive X-ray lasers to provide the engine for next-generation lithography.

OUR PLAN TO SCALE

Accelerate the future
Accelerate the future